HB01400 - SEMI HB14 - Test Method for Determining Geometrical Parameters of Patterns on Patterned Sapphire Substrate Revision:SEMI HB14-0223 - Current SEMI F87-0304 (first published)

SEMI F87-0304 (first published)

SEMI F79-0914 (technical revision)

Utilities and Materials Used by Semiconductor Manufacturing EquipmentSEMI S26 — Environmental

SEMI D22に準じる。

HB01400 - SEMI HB14 - Test Method for Determining Geometrical Parameters of Patterns on Patterned Sapphire Substrate Revision:SEMI HB14-0223 - Current SEMI F87-0304 (first published)Because there are various requirements and measurement methods for patterned sapphire substrate (PSS) in the LED industry, a standardized measurement method of PSS needs to be established so that customers and PSS suppliers can work together smoothly. It is necessary to establish a standardized measurement method of PSS so that PSS suppliers will be able to provide clear and consistent product information to customers. Provides a measurement method