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The ability to track equipment performance without user input is essential in 300 mm wafer factories where operational scenarios require minimal manual interaction
This Test Method covers the measurement of generation lifetime and generation velocity of silicon wafers
Because wafer boxes are routinely stacked for storage
The use of silicon wafers in many semiconductor devices requires a consistent atomic lattice structure
S01900 - SEMI S19 - 半導體製造設備之安裝、保養及維修人員訓練之安全基準 Revision:SEMI S19-1102 - Superseded The ability to track equipmentNOTICE: This translation is a REFERENCE COPY ONLY. If differences should exist between the English version and a translation in any other language, the English version is the official and authoritative version. 200282920029www. semi. org200211 EHS EHS EHS Referenced SEMI Standards None.
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