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E03700 - SEMI E37 - Specification for High-Speed SECS Message Services (HSMS) Generic Services StdPbc-0224 The Standard also provides definitions

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The Standard also provides definitions of what the equivalent of equipment-based training should be

本スタンダードは,the Information & Control Global Technical Committeeで技術的に承認されている。現版は2015年2月10日, global Audits and Reviews Subcommitteeにて発行が承認された。2015年6月にwww

threaded seals are beyond the scope of this Document

コンピュータウィルスによる情報の破壊や情報漏洩による機密性の侵害,サービス拒否による情報可用性の制限などのインシデントが至る所で頻繁に報告されている。そのような状況で,半導体製造装置の情報システムもまた,これらの脅威にさらされている。

E03700 - SEMI E37 - Specification for High-Speed SECS Message Services (HSMS) Generic Services StdPbc-0224 The Standard also provides definitionsHigh Speed SECS Message Services (HSMS) provides a means for independent manufacturers to produce implementations which can be connected and interoperate without requiring specific knowledge of one another. HSMS is intended as an alternative to SEMI E4 (SECS I) for applications where higher speed communication is needed or when a simple point to point topology is insufficient. SEMI E4 (SECS I) can still be used in applications where these and other

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