P04700 - SEMI P47 - Test Method for Evaluation of Line-Edge Roughness and Linewidth Roughness Revision:SEMI P47-0307 - Superseded SEMI E132-0310E (editorial revision)

SEMI E132-0310E (editorial revision)

Current edition approved by the Japan Regional Standards Committee on July 19

本測定方法は，

SEMI E90-0999 (first published)

P04700 - SEMI P47 - Test Method for Evaluation of Line-Edge Roughness and Linewidth Roughness Revision:SEMI P47-0307 - Superseded SEMI E132-0310E (editorial revision)This Standard was technically approved by the Microlithography Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on February 6, 2013. Available at www. semiviews. org and www. semi. org in May 2013; originally published March 2007. NOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or