E07000 - SEMI E70 - Guide for Tool Accommodation Process StdPbc-1021 SEMI E30 — Generic Model

SEMI E30 — Generic Model for Communication and Control of Manufacturing Equipment (GEM)

本文書は，自動および手動での基板搬送についてホストが情報を知り，その役割を果たし易くするスタンダードを定義するものである。また，製造装置における材料処理を制御するために有用になることも意図としている。具体的には，以下の内容を提供する。

This Test Method provides a common basis for communication between slurry manufacturers and users

and Maintainability (RAM) and Utilization

E07000 - SEMI E70 - Guide for Tool Accommodation Process StdPbc-1021 SEMI E30 — Generic ModelThis Guide provides an overview of the various elements of Tool Accommodation, a methodology by which semiconductor processing equipment is installed in a cost effective and timely manner. This addition to the SEMI Tool Accommodation Standards set describes the process by which the referenced SEMI Standards can be effectively used to achieve tool installation cost and schedule goals. This overview Guide provides process development, facilities,