G09100 - SEMI G91 - Standard Test Data Format (STDF) Memory Fail Datalog StdPbc-1023 Effective use of the metric

Effective use of the metric to build a COO model requires identification of constraints and data values

レシピの完全管理 —ある装置においてプロセスの実行方法を定めるレシピはFICS 内で使われることを意図したレシピと同等であることの保障。

from virgin substrates to fully patterned substrates

and mandatory actions

G09100 - SEMI G91 - Standard Test Data Format (STDF) Memory Fail Datalog StdPbc-1023 Effective use of the metricNOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use. The purpose of this Standard is to provide a common format for memory fail datalog specification along with necessary synchronization information enabling an efficient dataflow for volume diagnostics applications for